Variation of rate constants with temperature: The values of D and k (and hence A and B) will depend on the operating temperature. The linear and parabolic rate constants are exponentially related to the temperature as shown in the figures. Note that constants are more for wet oxidation compared to dry oxidation. Typical oxidation temperature range is between 900 and 1200 ◦C.

Fig 7.3. Arrhenius plot of linear and parabolic rate constants, for wet and dry oxidation .
The plots are given for Si(100) and will change for other crystal orientations. The growth rate will also depend on the dopant level and are not considered here.